5th International Symposium on Plasma Process-Induced Damage, 2000

0 ratings • 0 reviews • 0 shelved
Book cover for 5th International Symposium on Plasma Process-Induced Damage, 2000
Shelve It

Bookhype may earn a small commission from qualifying purchases. Full disclosure.

This text covers topics such as: CVD process damage effects; electron shading mechanism; front-end process damage effects; damage in multilevel interconnects; damage effects characterization; 300mm technology; thin dielectrics and degradation mechanisms and antenna test structures and design.
  • ISBN10 0965157741
  • ISBN13 9780965157742
  • Publish Date 31 January 2001
  • Publish Status Active
  • Publish Country US
  • Imprint I.E.E.E.Press
  • Format Paperback
  • Pages 182
  • Language English