The product of decades of Russian research in semiconductor technology, this invaluable book offers Western researchers and engineers a wide range of new techniques, recipes, and characterization methods that provide simpler, cheaper, and more effective solutions to problems in semiconductor processing and fabrication. Many of these approaches appear here for the first time in Western technological literature.
- ISBN10 0471127922
- ISBN13 9780471127925
- Publish Date 24 September 1997
- Publish Status Out of Stock
- Out of Print 16 June 2009
- Publish Country US
- Imprint John Wiley & Sons Inc
- Format Hardcover
- Pages 264
- Language English