Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology (Lecture Notes in Computer Science, #1)

F H P M Habraken

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  • ISBN10 0387539549
  • ISBN13 9780387539546
  • Publish Date 1 July 1991
  • Publish Status Active
  • Publish Country DE
  • Imprint Springer
  • Format Paperback (US Trade)
  • Pages 159
  • Language English