Microelectromechanical Systems: Advanced Materials and Fabrication Methods

by National Research Council

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  • ISBN10 0309058856
  • ISBN13 9780309058858
  • Publish Date 1 January 1997
  • Publish Status Active
  • Publish Country US
  • Imprint National Academies Press
  • Format Paperback
  • Pages 68
  • Language English