Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for
- ISBN10 0792311124
- ISBN13 9780792311126
- Publish Date 31 January 1991
- Publish Status Active
- Publish Country US
- Publisher Springer
- Imprint Kluwer Academic Publishers
- Format Hardcover
- Pages 292
- Language English