Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
- ISBN13 9783658192372
- Publish Date 22 September 2017
- Publish Status Active
- Publish Country DE
- Imprint Springer Vieweg
- Edition 1st ed. 2018
- Format Paperback
- Pages 316
- Language English