The book describes the main achievements in the use of laser radiation in microelectronic technology. It presents the physical origin of the action of laser radiation on semiconductors, insulators and metals, and describes photochemical processes under the influence of laser radiation. It also gives the analysis for laser systems used in microelectronics for technological purposes in addition to describing the state of the art in laser treatment of materials.
- ISBN10 981020602X
- ISBN13 9789810206024
- Publish Date 31 August 1996
- Publish Status Active
- Publish Country SG
- Imprint World Scientific Publishing Co Pte Ltd
- Format Hardcover
- Pages 50
- Language English