Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
- ISBN13 9780792345671
- Publish Date 31 May 1997
- Publish Status Active
- Publish Country NL
- Imprint Springer
- Edition 1997 ed.
- Format Hardcover
- Pages 613
- Language English