Mems Reliability (MEMS Reference Shelf)

by Allyson L Hartzell, Mark G Da Silva, and Herbert R Shea

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Book cover for Mems Reliability

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The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it.

MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.

  • ISBN10 1441960295
  • ISBN13 9781441960290
  • Publish Date 4 November 2010
  • Publish Status Withdrawn
  • Out of Print 18 October 2014
  • Publish Country US
  • Imprint Springer
  • Format Paperback (US Trade)
  • Pages 308
  • Language English