Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
- ISBN13 9780470298817
- Publish Date 21 April 2008 (first published 5 November 1980)
- Publish Status Active
- Publish Country US
- Imprint Wiley-Interscience
- Format eBook
- Pages 432
- Language English
- URL http://wiley.com