Microlithography: Process Technology for Integrated Circuit Fabrication

by David J. Elliott

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  • ISBN10 0070193045
  • ISBN13 9780070193048
  • Publish Date 1 January 1986
  • Publish Status Out of Print
  • Out of Print 14 May 1997
  • Publish Country US
  • Publisher McGraw-Hill Education - Europe
  • Imprint McGraw-Hill Inc.,US
  • Format Hardcover
  • Pages 378
  • Language English