This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
- ISBN13 9780387245201
- Publish Date 6 September 2006 (first published 1 January 2006)
- Publish Status Active
- Publish Country US
- Imprint Springer-Verlag New York Inc.
- Edition 1st Corrected ed. 2006. Corr. 2nd printing 2006
- Format Hardcover
- Pages 2094
- Language English