Plasma Deposition of Amorphous Silicon-Based Materials: Plasma-Materials Interactions (Plasma--Materials Interactions)

Giovanni Bruno (Editor), Pio Capezzuto (Editor), and Arun Madan (Editor)

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  • ISBN10 6611054103
  • ISBN13 9786611054106
  • Publish Date 25 September 1995 (first published 1 January 1995)
  • Publish Status Active
  • Out of Print 22 June 2011
  • Publish Country US
  • Imprint Elsevier Science & Technology
  • Format eBook
  • Pages 324
  • Language English