Multi-Wafer Rotating Mems Machines: Turbines, Generators, and Engines

by Jeffrey Lang

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  • ISBN10 0387777474
  • ISBN13 9780387777474
  • Publish Date December 2009
  • Publish Status Active
  • Publish Country US
  • Imprint Springer-Verlag New York Inc.
  • Edition New ed.
  • Format eBook
  • Pages 472
  • Language English