An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin film, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts. The key topics include: Principles and examples of making thin-film materials and devices such as nanometer composite thin films, nanometer superlattice of compound ceramics, micro-sensors and actuators, micro-MEMS, mobile compact/flexible ferroelectric memory, flat display including plasma display and PLD, and thin film catalysis, solar battery, and large-area functional window glass coating for energy and environmental uses. It covers techniques in automotive parts coatings :non-peel plastics coatings with metal, alloy, and compound films.
- ISBN10 3540211187
- ISBN13 9783540211181
- Publish Date 24 September 2004 (first published 10 May 2004)
- Publish Status Active
- Out of Print 19 June 2015
- Publish Country DE
- Publisher Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
- Imprint Springer-Verlag Berlin and Heidelberg GmbH & Co. K
- Format Hardcover
- Pages 532
- Language English