This tutorial text covers lithography process control at several levels, from fundamental through advanced topics. A basic familiarity with lithography science is assumed. The book is intended to be a self contained tutorial that works as an introduction to those entering the field, and as a reference for the experienced lithography engineer.
- ISBN13 9780819430526
- Publish Date 1 February 1999
- Publish Status Active
- Publish Country US
- Imprint SPIE Press
- Format Paperback
- Pages 194
- Language English