Microlithography and Metrology in Micromachining III

Craig R Friedrich (Editor) and Akira Umeda (Editor)

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  • ISBN10 0819426571
  • ISBN13 9780819426574
  • Publish Date 1 January 1997
  • Publish Status Active
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 134
  • Language English