Measurement Technology for Micro-Nanometer Devices

by Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, and Chenyang Xue

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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

- Highlights the advanced research work from industry and academia in micro-nano devices test technology
- Written at both introductory and advanced levels, provides the fundamentals and theories
- Focuses on the measurement techniques for characterizing MEMS/NEMS devices
  • ISBN13 9781118718001
  • Publish Date 30 November 2016 (first published 18 October 2016)
  • Publish Status Cancelled
  • Publish Country US
  • Imprint John Wiley & Sons Inc