A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.
Key topics covered include:
Silicon as MEMS material
Material properties and measurement techniques
Analytical methods used in materials characterization
Modeling in MEMS
Measuring MEMS
Micromachining technologies in MEMS
Encapsulation of MEMS components
Emerging process technologies, including ALD and porous silicon
Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities.
Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland.
Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland.
Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland.
Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan.
- ISBN10 1282541145
- ISBN13 9781282541146
- Publish Date 1 January 2009
- Publish Status Active
- Out of Print 17 June 2015
- Publish Country US
- Imprint William Andrew
- Format eBook
- Pages 636
- Language English