This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
- ISBN10 0471232556
- ISBN13 9780471232551
- Publish Date 30 January 2003
- Publish Status Unknown
- Publish Country US
- Imprint John Wiley & Sons Inc
- Format eBook
- Language English