Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors (SpringerBriefs in Applied Sciences and Technology)

by Toan Dinh, Nam-Trung Nguyen, and Dzung Viet Dao

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This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.

  • ISBN13 9789811325700
  • Publish Date 23 October 2018
  • Publish Status Active
  • Publish Country SG
  • Imprint Springer Verlag, Singapore
  • Edition 1st ed. 2018
  • Format Paperback
  • Pages 115
  • Language English