Materials for Microlithography: Radiation-Sensitive Polymers

by American Chemical Society

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  • ISBN10 0841208719
  • ISBN13 9780841208711
  • Publish Date 31 December 1987
  • Publish Status Active
  • Out of Print 10 May 2014
  • Publish Country US
  • Imprint American Chemical Society
  • Format Hardcover
  • Pages 494
  • Language English