Integrated Processing for Micro- and Optoelectronics: Proceedings of Symposium D on Integrated Processing for Micro- and Optoelectronics of the 1993 E-MRS Spring Conference, Strasbourg, France, 4-7 May 1993 (European Materials Research Aociety Symposia Proceedings S., v. 42)

Yves I. Nissim (Editor), etc. (Editor), A. Katz (Editor), and G.W. Rubloff (Editor)

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These proceedings focus on the technology application driving forces for multichamber approaches to semiconductor process sequences, otherwise called cluster tools or integrated processing and present research results upon which these manufacturing technologies are built.
  • ISBN10 0444819835
  • ISBN13 9780444819833
  • Publish Date October 1994
  • Publish Status Out of Print
  • Out of Print 17 October 2009
  • Publish Country GB
  • Publisher Taylor & Francis Ltd
  • Imprint Elsevier Science Ltd
  • Format Hardcover
  • Pages 320
  • Language English