Advances in Resist Materials and Processing Technology XXVII

by Robert Allen

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  • ISBN10 0819480533
  • ISBN13 9780819480538
  • Publish Date 31 December 2010
  • Publish Status Active
  • Out of Print 11 May 2017
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 1010
  • Language English