Plasma-Surface Interactions of Advanced Photoresist Systems

by Sebastian Engelmann

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  • ISBN10 3639178246
  • ISBN13 9783639178241
  • Publish Date 18 September 2009
  • Publish Status Active
  • Publish Country DE
  • Imprint VDM Verlag
  • Format Paperback (US Trade)
  • Pages 172
  • Language English