IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.
- ISBN13 9780819490926
- Publish Date 11 January 2013 (first published 19 January 2001)
- Publish Status Transferred
- Out of Print 24 April 2021
- Publish Country US
- Imprint SPIE Press
- Format Hardcover
- Pages 704
- Language English