In the education area, Professor Campbell leads the University of Minnesota's participation in Nano-Link, an NSF sponsored regional center for nanotechnology education at the AAS level. He has designed and implemented a one-semester capstone experience Microelectronic Fabrication and created the text book as a result. Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, this fourth
edition of Fabrication Engineering at the Micro- and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. The text covers the entire basic unit
processes used to fabricate integrated circuits and other devices.
- ISBN10 0199861218
- ISBN13 9780199861217
- Publish Date 29 November 2012
- Publish Status Unknown
- Publish Country GB
- Imprint Oxford University Press
- Edition 4th edition
- Format Paperback
- Pages 82
- Language English