Particle Control for Semiconductor Manufacturing

by Donovan

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Book cover for Particle Control for Semiconductor Manufacturing

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There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In
  • ISBN13 9781351425759
  • Publish Date 4 May 2018
  • Publish Status Active
  • Publish Country GB
  • Publisher Taylor & Francis Ltd
  • Imprint CRC Press
  • Format eBook
  • Pages 480
  • Language English