Force Sensors for Microelectronic Packaging Applications (Microtechnology and MEMS)

by J Rg Schwizer, Lecturer in Strategic and International Management Michael Mayer, and Oliver Brand

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Intended for wire-bonding and flip-chip packaging professionals and for scientists and engineers working in the field of mechanical microsensors, this practical monograph introduces novel measurement technologies that allow for in situ and real-time examination of physical processes during the packaging process or during subsequent reliability tests. The measurement system presented here makes possible measurements at formerly inaccessible packaging interconnects. For the first time it becomes possible to describe the wire-bonding process window in terms of the physical forces at the contact zone instead of the applied machine settings. This is significant for a deeper understanding and future development of these packaging processes. Applications of the sensor in the field of wire bonding and flip-chip characterization are also illustrated. The reader will gain much insight into the important field of interconnection technology in semiconductor packaging.

  • ISBN10 3540802150
  • ISBN13 9783540802150
  • Publish Date 10 September 2008 (first published 21 October 2004)
  • Publish Status Withdrawn
  • Out of Print 18 October 2014
  • Publish Country US
  • Imprint Springer
  • Format Paperback (US Trade)
  • Pages 188
  • Language English