Fabrication & Design of Resonant Microdevices

by Behraad Bahreyni

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  • ISBN10 1282552635
  • ISBN13 9781282552630
  • Publish Date 1 January 2008 (first published 31 December 2004)
  • Publish Status Active
  • Out of Print 17 June 2015
  • Publish Country US
  • Imprint William Andrew
  • Format eBook
  • Pages 524
  • Language English