An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.
- ISBN10 0815514832
- ISBN13 9780815514831
- Publish Date 31 December 2004
- Publish Status Out of Print
- Out of Print 13 March 2021
- Publish Country US
- Imprint William Andrew Publishing
- Format Hardcover
- Pages 532
- Language English