Handbook of Vacuum ARC Science & Technology: Fundamentals and Applications

by Raymond L Boxman, David Haber, and Philip J Martin

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Book cover for Handbook of Vacuum ARC Science & Technology

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Traces the technology behind the spectacular growth in the silicon semiconductor industry and continued trend in miniaturization over the last 20 years.
  • ISBN10 6612755075
  • ISBN13 9786612755071
  • Publish Date 14 January 1997 (first published 1 January 1995)
  • Publish Status Active
  • Out of Print 29 May 2012
  • Publish Country US
  • Imprint Elsevier Science & Technology
  • Format eBook
  • Pages 773
  • Language English