Metal Based Thin Films for Electronics

Klaus Wetzig (Editor) and Claus M. Schneider (Editor)

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This up-to-date handbook covers the main topics of preparation, characterization and properties of complex metal-based layer systems. The authors -- an outstanding group of researchers -- discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers, such as metallization and barrier layers for microelectronics, magnetoresistive layers for GMR and TMR, sensor and resistance layers. As such, the book addresses materials specialists in industry, especially in microelectronics, as well as scientists, and can also be recommended for advanced studies in materials science, analytics, surface and solid state science.
  • ISBN13 9783527606474
  • Publish Date 6 March 2006 (first published 1 January 2003)
  • Publish Status Active
  • Publish Country GB
  • Imprint Wiley-VCH Verlag GmbH