Spectroscopic Ellipsometry for the In-situ Investigation of Atomic Layer Depositions

by Varun Sharma

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  • ISBN10 3656923159
  • ISBN13 9783656923152
  • Publish Date 27 April 2015
  • Publish Status Active
  • Imprint Grin Verlag
  • Format Paperback (US Trade)
  • Pages 112
  • Language English