A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.
- ISBN10 1580535917
- ISBN13 9781580535915
- Publish Date 1 July 2004 (first published 30 November 1999)
- Publish Status Active
- Publish Country US
- Imprint Artech House Publishers
- Format eBook
- Language English