A selection of 51 papers on various aspects of the electronics and structures used in the field of microelectromechanical systems.
- ISBN13 9780819434920
- Publish Date 1 October 1999
- Publish Status Out of Print
- Out of Print 14 September 2016
- Publish Country US
- Imprint SPIE Press
- Format Paperback
- Pages 428
- Language English