In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.
- ISBN10 3527406336
- ISBN13 9783527406333
- Publish Date 18 July 2007 (first published 1 January 2007)
- Publish Status Active
- Publish Country DE
- Imprint Wiley-VCH Verlag GmbH
- Format Hardcover
- Pages 315
- Language English