This is the only book of its kind to focus on closed form solutions to micro-mechanical problems. This approach allows readers to easily understand the linear and nonlinear behavior of Micro Electro Mechanical Systems (MEMS) and their design applications. This approach will appeal especially to RF/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The book is also of interest to researchers in MEMS, graduate students in electrical and mechanical engineering, and specialists in electronics design and solid-state fabrication.
- ISBN13 9781118102244
- Publish Date 21 March 2011 (first published 28 October 2010)
- Publish Status Active
- Publish Country US
- Imprint Wiley-IEEE Press
- Format eBook
- Pages 680
- Language English
- URL http://wiley.com/remtitle.cgi?isbn=111810224X