Handbook of VLSI Microlithography: Principles, Technology, and Applications

by John N Helbert

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This is a comprehensive text describing the basic physics and technological applications of vacuum arcs. Part I describes basic physics of the vacuum arc, beginning with a brief tutorial review of plasma and electrical discharge physics, then describes the arc ignition process, cathode and anode spots which serve as the locus for plasma generation, and resultant interelectrode plasma. Part II describes the applications of the vacuum arc for depositing thin films and coatings, refining metals, switching high power, and as sources of intense electron, ion, plasma, and x-ray beams.
  • ISBN10 6612253207
  • ISBN13 9786612253201
  • Publish Date 1 January 2001 (first published 31 December 1996)
  • Publish Status Active
  • Out of Print 2 February 2010
  • Publish Country US
  • Imprint Elsevier Science & Technology
  • Format eBook
  • Language English