Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence Presents comprehensive coverage of process sequences Introduces readers to modern simulation tools Addresses the practical aspects of integrated circuit fabrication Clearly explains basic processing theory
- ISBN10 0471232793
- ISBN13 9780471232797
- Publish Date 28 August 2007 (first published 10 June 2003)
- Publish Status Active
- Publish Country US
- Imprint John Wiley & Sons Inc
- Format Paperback
- Pages 320
- Language English