Wafer Fabrication: Automatic Material Handling System

by Jie Zhang

Huazhong University of Science and Technology

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Book cover for Wafer Fabrication

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This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
  • ISBN10 3110486903
  • ISBN13 9783110486902
  • Publish Date 24 September 2018
  • Publish Status Active
  • Publish Country DE
  • Imprint De Gruyter