This volume provides a topical and comprehensive survey on methods and tools for optical metrology and illustrates their areas of application. As manufacturing technologies and producion processes improve, so does the need for powerful measurement and testing tools. Optical metrology meets this demand by offering high accuracy and resolution, fast data acquisition, high information density and more flexibility In this handbook, the authors address the experimental details and practical applications of optical metrology, with information on materials, optical and mechanical components and evaluation methods.
- ISBN10 3527400664
- ISBN13 9783527400669
- Publish Date 14 October 1993
- Publish Status Cancelled
- Publish Country DE
- Imprint Wiley-VCH Verlag GmbH
- Format Hardcover
- Pages 300
- Language English