Plasma Processing of Semiconductors

by Paul Williams

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  • ISBN10 9401158851
  • ISBN13 9789401158855
  • Publish Date 15 January 2014
  • Publish Status Withdrawn
  • Out of Print 18 October 2014
  • Publish Country US
  • Imprint Springer
  • Format Paperback (US Trade)
  • Pages 628
  • Language English