This completely revised edition of the first concise introduction to microsystems technology includes the latest trends of this emerging scientific discipline. Especially the chapters on silicium and LIGA technology are severely expanded. New topics include application aspects in medicine and health technology, lithography and electroplating.
- ISBN10 3527294058
- ISBN13 9783527294053
- Publish Date 15 May 1997
- Publish Status Out of Print
- Out of Print 8 October 2008
- Publish Country DE
- Imprint Wiley-VCH Verlag GmbH
- Format Hardcover
- Pages 453
- Language English