High Density Plasma Sources: Design, Physics, and Performance

by Oleg A Popov

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  • ISBN10 0815517882
  • ISBN13 9780815517887
  • Publish Date December 1995
  • Publish Status Active
  • Publish Country US
  • Publisher William Andrew Publishing
  • Imprint Noyes Publications
  • Format eBook
  • Pages 426
  • Language English