Micromachining and Microfabrication Process Technology XVII: 24 and 26 January 2012, San Francisco, California, United States

by Mary-Ann Maher

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  • ISBN10 0819488917
  • ISBN13 9780819488916
  • Publish Date 1 January 2012
  • Publish Status Active
  • Out of Print 11 May 2017
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 162
  • Language English