Materials Design, Fabrication, Packaging and Reliability of Nano and Micro-Electro-Mechanical Systems (N/MEMS) (Wiley Materials for Electronic & Optoelectronic Applications) (Wiley Series in Materials for Electronic & Optoelectronic Applications) (Wiley Series in Materials for Electronic & Optoelectronic Ap)

by Mustafa Yavuz, Arthur Willoughby, Peter Capper, and Safa Kasap

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  • ISBN10 1119130794
  • ISBN13 9781119130796
  • Publish Date 10 June 2021 (first published 12 February 2021)
  • Publish Status Forthcoming
  • Publish Country US
  • Publisher John Wiley and Sons Ltd
  • Imprint Wiley-Blackwell
  • Format Hardcover
  • Pages 424
  • Language English