Analytical and Diagnostic Technicques for Semiconductor Materials, Devices and Processes (Proceedings of SPIE, Vol 5133)

by Bernd O. Kolbesen, C. Claeys, Peter Stallhofer, and etc.

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  • ISBN10 0819449997
  • ISBN13 9780819449993
  • Publish Date 31 May 2003
  • Publish Status Unknown
  • Out of Print 10 June 2013
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 568
  • Language English