Vacuum Mechatronics (Electronic Materials & Devices Library)

by Gerardo Beni, etc., S. Belinski, M. Shirazi, Shigang Li, L. Karuppiah, and S. Hackwood

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A combination of original material and reprints, this text explains vacuum mechanism design, control, components and applications including automated systems and robotics.
  • ISBN10 0890064563
  • ISBN13 9780890064566
  • Publish Date 1 April 1990
  • Publish Status Active
  • Publish Country US
  • Imprint Artech House Publishers
  • Format Paperback
  • Pages 388
  • Language English