AIP Conference Proceedings

1 primary work

Frontiers of Characterization and Metrology for Nanoelectronics

Published 17 October 2007

As the semiconductor industry continues to move toward silicon nanoelectronics and beyond, the introduction of new materials, innovative processing and assembly, and novel devices brings formidable metrology challenges. This book emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics.